lost wafer process

lost wafer process
 Lost Wafer Process
 Процесс утонения подложки
  Технология селективного травления кремниевой подложки, в результате которого удаляется её большая часть, а также некоторая часть диффузионного слоя.

Толковый англо-русский словарь по нанотехнологии. - М.. . 2009.

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